journal article·2021-08Open access

Quantification and Mitigation of Electron-Beam-Induced Carbon Contamination

Milena Hugenschmidt, Katharina Adrion, Aaron Marx, Erich Müller, Dagmar Gerthsen

Microscopy and Microanalysis· Volume 27· Issue S1

Abstract

Milena Hugenschmidt, Katharina Adrion, Aaron Marx, Erich Müller, Dagmar Gerthsen; Quantification and Mitigation of Electron-Beam-Induced Carbon Contaminati
Only a short abstract or summary was supplied by the source.
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Research context

OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Radiation Therapy and Dosimetry · X-ray Spectroscopy and Fluorescence Analysis

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References (7)

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5. [7] We acknowledge funding by the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) under Germany's Excellence Strategy – 2082/1 – 390761711 and thank the Carl Zeiss Foundation for financial support.
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7. Mitchell · Micron · 2015 · 73 · 3610.1016/j.micron.2015.03.013 ↗