Precise Measurements of Transmission Attenuation in Mass-Thickness Contrast TEM Images
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Abstract
Journal Article Precise Measurements of Transmission Attenuation in Mass-Thickness Contrast TEM Images Get access Jun Yamasaki, Jun Yamasaki Research Center for Ultra-High Voltage Electron Microscopy, Osaka University, Ibaraki, JapanInstitute of Materials and Systems for Sustainability, Nagoya University, Nagoya, Japan Corresponding author: yamasaki@uhvem.osaka-u.ac.jp Search for other works by this author on: Oxford Academic Google Scholar Yuya Ubata, Yuya Ubata Department of Electronic Engineering, Osaka University, Suita, Japan Search for other works by this author on: Oxford Academic Google Scholar Hidehiro Yasuda Hidehiro Yasuda Research Center for Ultra-High Voltage Electron Microscopy, Osaka University, Ibaraki, JapanDivision of Materials and Manufacturing Science, Osaka University, Suita, Japan Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 25, Issue S2, 1 August 2019, Pages 2418–2419, https://doi.org/10.1017/S1431927619012820 Published: 01 August 2019
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OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications · Integrated Circuits and Semiconductor Failure Analysis
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References (4)
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1. 10.1098/rspa.1910.007410.1098/rspa.1910.0074 ↗
2. 10.1093/jmicro/dfu02010.1093/jmicro/dfu020 ↗
3. The authors are grateful to Prof. H. Mori for invaluable discussion and Mr. E. Taguchi, Mr. T. Sakata and Mr. T. Yasuda of Osaka university, and Mr. A. Ohsaki, Dr. S. Ohta, and Mr. S. Takakuwa of JEOL Co., Ltd., and Dr. S. Arai of Nagoya university for their assistance with the experiments. This work was partly supported by MEXT KAKENHI (grant number 26105009).
4. Yamasaki · Ultramicroscopy · 2019