journal article·2019-08Open access

Impact of Electron Energy and Dose on Particle Dynamics Imaging in the Scanning Electron Microscope

Yige Gao, Satyam Srivastava, Paul Y. Kim, David A. Hoagland, Thomas P. Russell, Alexander E. Ribbe

Microscopy and Microanalysis· Volume 25· Issue S2

Abstract

Journal Article Impact of Electron Energy and Dose on Particle Dynamics Imaging in the Scanning Electron Microscope Get access Yige Gao, Yige Gao Polymer Science & Engineering Department, University of Massachusetts, Amherst, United States Search for other works by this author on: Oxford Academic Google Scholar Satyam Srivastava, Satyam Srivastava Polymer Science & Engineering Department, University of Massachusetts, Amherst, United States Search for other works by this author on: Oxford Academic Google Scholar Paul Y Kim, Paul Y Kim Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California, United States Search for other works by this author on: Oxford Academic Google Scholar David A Hoagland, David A Hoagland Polymer Science & Engineering Department, University of Massachusetts, Amherst, United States Search for other works by this author on: Oxford Academic Google Scholar Thomas P Russell, Thomas P Russell Polymer Science & Engineering Department, University of Massachusetts, Amherst, United StatesMaterials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California, United States Search for other works by this author on: Oxford Academic Google Scholar Alexander E Ribbe Alexander E Ribbe Polymer Science & Engineering Department, University of Massachusetts, Amherst, United States Corresponding author: aeribbe@umass.edu Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 25, Issue S2, 1 August 2019, Pages 1670–1671, https://doi.org/10.1017/S1431927619009085 Published: 01 August 2019
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OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications · Integrated Circuits and Semiconductor Failure Analysis

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References (7)

Show source-provided references
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