Impact of Electron Energy and Dose on Particle Dynamics Imaging in the Scanning Electron Microscope
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Abstract
Journal Article Impact of Electron Energy and Dose on Particle Dynamics Imaging in the Scanning Electron Microscope Get access Yige Gao, Yige Gao Polymer Science & Engineering Department, University of Massachusetts, Amherst, United States Search for other works by this author on: Oxford Academic Google Scholar Satyam Srivastava, Satyam Srivastava Polymer Science & Engineering Department, University of Massachusetts, Amherst, United States Search for other works by this author on: Oxford Academic Google Scholar Paul Y Kim, Paul Y Kim Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California, United States Search for other works by this author on: Oxford Academic Google Scholar David A Hoagland, David A Hoagland Polymer Science & Engineering Department, University of Massachusetts, Amherst, United States Search for other works by this author on: Oxford Academic Google Scholar Thomas P Russell, Thomas P Russell Polymer Science & Engineering Department, University of Massachusetts, Amherst, United StatesMaterials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California, United States Search for other works by this author on: Oxford Academic Google Scholar Alexander E Ribbe Alexander E Ribbe Polymer Science & Engineering Department, University of Massachusetts, Amherst, United States Corresponding author: aeribbe@umass.edu Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 25, Issue S2, 1 August 2019, Pages 1670–1671, https://doi.org/10.1017/S1431927619009085 Published: 01 August 2019
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Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications · Integrated Circuits and Semiconductor Failure Analysis
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References (7)
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