journal article·2016-07Open access

A Review of Recent Developments in Low Energy Ion Scattering (LEIS) and Its Applications

Philipp Brüner, Thomas Grehl, Hidde H. Brongersma, Ewald Niehuis

Microscopy and Microanalysis· Volume 22· Issue S3

Abstract

Journal Article A Review of Recent Developments in Low Energy Ion Scattering (LEIS) and Its Applications Get access Philipp Brüner, Philipp Brüner ION-TOF GmbH, Münster, Germany Search for other works by this author on: Oxford Academic Google Scholar Thomas Grehl, Thomas Grehl ION-TOF GmbH, Münster, Germany Search for other works by this author on: Oxford Academic Google Scholar Hidde H Brongersma, Hidde H Brongersma ION-TOF GmbH, Münster, Germany Search for other works by this author on: Oxford Academic Google Scholar Ewald Niehuis Ewald Niehuis ION-TOF GmbH, Münster, Germany Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 22, Issue S3, 1 July 2016, Pages 358–359, https://doi.org/10.1017/S1431927616002646 Published: 25 July 2016
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Research context

OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Ion-surface interactions and analysis · Semiconductor materials and devices

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References (4)

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