“Smart Microscopy”: Feature Based Adaptive Sampling for Focused Ion Beam Scanning Electron Microscopy
Source abstract
Abstract
Tim Dahmen, Niels de Jonge, Patrick Trampert, Michael Engstler, Christoph Pauly, Frank Mücklich, Philipp Slusallek; “Smart Microscopy”: Feature Based Adapt
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications · Integrated Circuits and Semiconductor Failure Analysis
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References (2)
Show source-provided references
1. Image Rochester NY · 1998 · 256 · 170
2. German Patent No 10 2015 · 2015 · 114 · 9