Aberration Corrected Analytical Scanning and Transmission Electron Microscope for High-Resolution Imaging and Analysis for Multi-User Facilities
Source abstract
Abstract
H Inada, Y Taniguchi, T Yotsuji, Y Hirayama, T Dobashi, K Watanabe, H Kikuchi, H Muto, K Nakamura, T Ohnishi, W Shimoyama, D Terauchi, M Sakamaki, T Ooyagi
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Advanced Electron Microscopy Techniques and Applications · Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis
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References (1)
Show source-provided references
1. 10.1038/nmat253210.1038/nmat2532 ↗