SIMS Performed on Focused Ion Beam Instruments : In-situ Correlative Structural and Chemical Imaging
Source abstract
Abstract
Jean-Nicolas Audinot, Alexander D Ost, Charlotte Stoffels, Patrick Philipp, Olivier De Castro, Antje Biesemeier, Quang Hung Hoang, Tom Wirtz; SIMS Performe
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Ion-surface interactions and analysis · Advanced Electron Microscopy Techniques and Applications · Integrated Circuits and Semiconductor Failure Analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Luxembourg Institute of Science and Technology (LIST) Advanced Instrumentation for Nano-Analytics (AINA), MRT Department, , Belvaux, Luxembourg
University of Luxembourg , Esch-sur-Alzette, Luxembourg
References (7)
Show source-provided references
1. Wirtz · Annu. Rev. Anal. Chem · 2019 · 12 · 52310.1146/annurev-anchem-061318-115457 ↗
2. Audinot · Reports Prog. Phys · 2021 · 84 · 10590110.1088/1361-6633/ac1e32 ↗
3. Kim · Anal. Chem · 2019 · 91 · 1214210.1021/acs.analchem.9b03377 ↗
4. Wirtz · Microsc. Microanal · 2021 · 27 · 100810.1017/S1431927621003810 ↗
5. Knuffman · J. Appl. Phys · 2013 · 114 · 04430310.1063/1.4816248 ↗
6. Vollnhals · Anal. Chem · 2017 · 89 · 1070210.1021/acs.analchem.8b02530 ↗
7. Ost · Environ. Sci. Technol · 2021 · 55 · 938410.1021/acs.est.1c02971 ↗