Alternative Post-FIB Polishing Using Low-Energy Argon Ion Milling to Prevent Grid Redeposition
Source abstract
Abstract
Cecile Bonifacio, Pawel Nowakowski, Mary Ray, Paul Fischione; Alternative Post-FIB Polishing Using Low-Energy Argon Ion Milling to Prevent Grid Redepositio
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Advanced Surface Polishing Techniques · Integrated Circuits and Semiconductor Failure Analysis · Advanced Electron Microscopy Techniques and Applications
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References (4)
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1. Optimization of the preparation of GaN-based specimens with low-energy ion milling for (S)TEM10.1016/j.micron.2012.03.008 ↗
2. 2 keV Ga+ FIB milling for reducing amorphous damage in silicon10.1017/S1431927605507797 ↗
3. A review of focused ion beam milling techniques for TEM specimen preparation10.1016/S0968-4328(99)00005-0 ↗
4. Combining FIB milling and conventional argon ion milling techniques to prepare high-quality site-specific TEM samples for quantitative EELS analysis of oxygen in molten iron10.1111/j.1365-2818.2009.03341.x ↗