journal article·2016-07Open access

A Xe + Plasma FIB Milling and Lift-out Approach for Site-specific Preparation of Large Volume Blocks for 3D-EBSD

B. Winiarski, T.L. Burnett, P.J. Withers

Microscopy and Microanalysis· Volume 22· Issue S3

Abstract

B Winiarski, TL Burnett, PJ Withers; A Xe + Plasma FIB Milling and Lift-out Approach for Site-specific Preparation of Large Volume Blocks for 3D-EBSD, Micr
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: Advanced Materials Characterization Techniques · Integrated Circuits and Semiconductor Failure Analysis · Advanced Surface Polishing Techniques

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References (4)

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