DataVXMicroscopy and MicroanalysisPaper
journal article·2014-08Open access

Development of Two Steradian EDX System for the HD-2700 FE-STEM Equipped with Dual X-MaxN 100 TLE Large Area Windowless SDDs

Takahito Hashimoto, Keiji Tamura, Hiromi Inada, Keitaro Watanabe, Yoshihiro Ohtsu, Yuya Suzuki, Takahiro Sato, Takashi Kanemura, Simon Burgess, James Holland, Iain Anderson, Susumu Yamaguchi, Kuniyasu Nakamura

Microscopy and Microanalysis· Volume 20· Issue S3
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Abstract

Takahito Hashimoto, Keiji Tamura, Hiromi Inada, Keitaro Watanabe, Yoshihiro Ohtsu, Yuya Suzuki, Takahiro Sato, Takashi Kanemura, Simon Burgess, James Holla
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Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis · Advancements in Photolithography Techniques

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