journal article·2017-07Open access

Analytical Spatial Resolution in EPMA: What is it and How can it be Estimated?

Aurelien Moy, John Fournelle

Microscopy and Microanalysis· Volume 23· Issue S1

Abstract

Aurelien Moy, John Fournelle; Analytical Spatial Resolution in EPMA: What is it and How can it be Estimated?, Microscopy and Microanalysis, Volume 23, Issu
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Research context

OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Ion-surface interactions and analysis · Integrated Circuits and Semiconductor Failure Analysis

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References (4)

Show source-provided references
1. 10.1017/S155192951300051510.1017/S1551929513000515 ↗
2. Fournelle J et al, IOP Conf. Series: Materials Science and Engineering 109 (2016).10.1088/1757-899X/109/1/012003 ↗
3. Moy A & Fournelle J Microscopy and Microanalysis ((this conference).
4. 10.1007/s00604005005210.1007/s006040050052 ↗