Towards Automatic Lamella Thinning Using Live Thickness Measurements and Smart End-Point Detection
Source abstract
Abstract
Tobias Volkenandt, Fabian Perez-Willard, Michael Rauscher, Pascal Maria Anger; Towards Automatic Lamella Thinning Using Live Thickness Measurements and Sma
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Advancements in Photolithography Techniques · Advanced Surface Polishing Techniques · Manufacturing Process and Optimization
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References (1)
Show source-provided references
1. 10.1017/S143192760909645710.1017/S1431927609096457 ↗