journal article·2022-08-01Open access

Challenges in FIB TEM Sample Preparation: Damage Issues and Solutions

Xiangli Zhong, Xiaorong Zhou, Sarah J Haigh, Philip J Withers, M Grace Burke

Microscopy and Microanalysis· Volume 28· Issue S1

Abstract

Xiangli Zhong, Xiaorong Zhou, Sarah J Haigh, Philip J Withers, M Grace Burke; Challenges in FIB TEM Sample Preparation: Damage Issues and Solutions, Micros
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: Advanced Materials Characterization Techniques · Integrated Circuits and Semiconductor Failure Analysis · Electron and X-Ray Spectroscopy Techniques

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

University of Manchester Department of Materials,

Oak Ridge National Laboratory

References (5)

Show source-provided references
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