Deep Learning Enabled Measurements of Single-Atom Defects in 2D Transition Metal Dichalcogenides with Sub-Picometer Precision

Journal Article Deep Learning Enabled Measurements of Single-Atom Defects in 2D Transition Metal Dichalcogenides with Sub-Picometer Precision Get access Chia-Hao Lee, Chia-Hao Lee Department of Materials Science and Engineering, University of Illinois Urbana-Champaign, Urbana, IL, USA Search for other works by this author on: Oxford Academic Google Scholar Chuqiao Shi, Chuqiao Shi Department of Materials Science and Engineering, University of Illinois Urbana-Champaign, Urbana, IL, USA Search for other works by this author on: Oxford Academic Google Scholar Di Luo, Di Luo Department of Physics, University of Illinois Urbana-Champaign, Urbana, IL, USA Search for other works by this author on: Oxford Academic Google Scholar Abid Khan, Abid Khan Department of Physics, University of Illinois Urbana-Champaign, Urbana, IL, USA Search for other works by this author on: Oxford Academic Google Scholar Blanka E Janicek, Blanka E Janicek Department of Materials Science and Engineering, University of Illinois Urbana-Champaign, Urbana, IL, USA Search for other works by this author on: Oxford Academic Google Scholar Sangmin Kang, Sangmin Kang Department of Electrical and Computer Engineering, University of Illinois Urbana-Champaign, Urbana, IL, USA Search for other works by this author on: Oxford Academic Google Scholar Wenjuan Zhu, Wenjuan Zhu Department of Electrical and Computer Engineering, University of Illinois Urbana-Champaign, Urbana, IL, USA Search for other works by this author on: Oxford Academic Google Scholar Bryan K Clark, Bryan K Clark Department of Physics, University of Illinois Urbana-Champaign, Urbana, IL, USA Search for other works by this author on: Oxford Academic Google Scholar Pinshane Y Huang Pinshane Y Huang Department of Materials Science and Engineering, University of Illinois Urbana-Champaign, Urbana, IL, USA Corresponding author: pyhuang@illinois.edu Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 25, Issue S2, 1 August 2019, Pages 172–173, https://doi.org/10.1017/S1431927619001594 Published: 01 August 2019