DataVXMicroscopy and MicroanalysisPaper
journal article·2005-08Open access

Growth Mechanisms of Electron Beam Induced Carbon Deposition Using Hydrocarbon Contamination

A D Garetto, D D Griffis, P E Russell, P D Rack, J Fowlkes

Microscopy and Microanalysis· Volume 11· Issue S02
Publisher pageOpen full text
Source abstract

Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short

Research context

Materials processing

OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Plasma Diagnostics and Applications · Ion-surface interactions and analysis

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References

Reference metadata was not supplied for this record.