journal article·2019-08Open access

Plasma FIB Spin Milling for Large Volume Serial Sectioning Tomography

B. Winiarski, C. Rue, P.J. Withers

Microscopy and Microanalysis· Volume 25· Issue S2

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OpenAlex topics: Advanced Electron Microscopy Techniques and Applications · Integrated Circuits and Semiconductor Failure Analysis · Advanced X-ray Imaging Techniques

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References (10)

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