Advances in Multi-Beam and Multi-Ion FIB-SEM for 3D Correlative Microscopy

B. Winiarski; R. Geurts; S.J. Randolph; R. Gannon; G. Pyka; T. Varslot; P.J. Withers

doi:10.1017/s1431927619005087

journal article·2019-08Open access

Advances in Multi-Beam and Multi-Ion FIB-SEM for 3D Correlative Microscopy

B. Winiarski, R. Geurts, S.J. Randolph, R. Gannon, G. Pyka, T. Varslot, P.J. Withers

Microscopy and Microanalysis· Volume 25· Issue S2

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Abstract

B Winiarski, R Geurts, SJ Randolph, R Gannon, G Pyka, T Varslot, PJ Withers; Advances in Multi-Beam and Multi-Ion FIB-SEM for 3D Correlative Microscopy, Microsc

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OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Advanced Electron Microscopy Techniques and Applications · Ion-surface interactions and analysis

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References (6)

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