A Dedicated Multi-Beam SEM for Transmission Imaging of Thin Samples
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Abstract
Journal Article A Dedicated Multi-Beam SEM for Transmission Imaging of Thin Samples Get access Pieter Kruit, Pieter Kruit Delft University of Technology, Department of Imaging Physics, Delft, The Netherlands Corresponding author: p.kruit@tudelft.nl Search for other works by this author on: Oxford Academic Google Scholar Wilco Zuidema Wilco Zuidema Delft University of Technology, Department of Imaging Physics, Delft, The Netherlands Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 25, Issue S2, 1 August 2019, Pages 1034–1035, https://doi.org/10.1017/S1431927619005907 Published: 01 August 2019
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Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications · Integrated Circuits and Semiconductor Failure Analysis
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References (5)
Show source-provided references
1. 10.1111/jmi.1207110.1111/jmi.12071 ↗
2. Y. Zhang , A. Mohammadi-Gheidari and Y. Ren , PhD theses Delft University of Technology.
3. 10.1111/jmi.1222410.1111/jmi.12224 ↗
4. 10.1116/1.496621610.1116/1.4966216 ↗
5. This work is a cooperation between Delft University, Thermo Fischer Scientific, Delmic and Technolution.