Comparison of soft magnetic properties of Ni ₈₁ Fe ₁₉ film with different substrates used for microfluxgate

The soft magnetic properties of Ni ₈₁ Fe ₁₉ films, respectively, composed of Ti, Ta and Cr substrates used for a microfluxgate have been studied in this reported work. The films were characterised using a transmission electron microscope, X‐ray diffraction, a vibrating sample magnetometer and a fluxgate solenoid. The testing results showed that Ta substrate film, because of its ladder rising hysteresis loop, is the most appropriate one for the fluxgate core in these four kinds of Ni ₈₁ Fe ₁₉ films, the original Ni ₈₁ Fe ₁₉ film, and the film with Ti substrate takes second place, and the Cr substrate film would not be suitable as the fluxgate core because of its bad soft magnetic properties.