Effect of methane flow rate on microstructure and tribological properties of (Cu, Ce)/Ti co-doped DLC films fabricated via reactive magnetron sputtering technology
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Abstract
Effect of methane flow rate on microstructure and tribological properties of (Cu, Ce)/Ti co-doped DLC films fabricated via reactive magnetron sputtering technology, Wu, Yang-Min, Ma, Li-Qiu, Zhou, Sheng-Guo, Zhao, Wen-Jie, Ouyang, Lu
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Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Advanced materials and composites
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (27)
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