Surface morphology and photoelectric properties of FTO ceramic thin films under a simple transparent cover-assisted laser annealing

Abstract A simple transparent cover-assisted laser annealing strategy, which used a coverglass or a PET sheet as the transparent cover, was proposed to improve photoelectric properties of fluorine-doped tin oxide (FTO) thin films. Pure laser annealing was also performed for comparison. Transparent cover-assisted laser annealing was found to be more effective for producing densely distributed particles, decreasing surface roughness and increasing grain size, thus enhancing transmittance and conductivity of the film. More importantly, compared with coverglass-assisted laser annealing, PET-assisted laser annealing enabled the film surface to be covered with more uniform and denser particles and exhibit a remarkable increase in grain size. Therefore the film had the highest total transmittance of 84.32%, the highest specular transmittance of 75.88%, a slightly decreased haze of 10.01% and the lowest sheet resistance of 7.36 Ω/sq. The simple PET-assisted laser annealing method may be a promising substitution for the conventional laser annealing treatment.