Influence of the substrate temperature on the microstructure and electron-induced secondary electron emission properties of MgO/Au composite film
Source abstract
Abstract
Abstract The influence of the substrate temperature (Ts) on the microstructure and electron-induced secondary electron emission (SEE) properties of MgO/Au composite film prepared by reactive magnetron sputtering was investigated in order to improve the SEE performance of this composite film. During the deposition of MgO/Au film, a relatively high Ts is conducive to the growth of MgO grains and causes the formation of some large aggregated gold particles on which MgO grains cover in the composite film. In terms of the SEE properties of MgO/Au film, the increase of Ts brings about a significant improvement of SEE coefficient (δ), while it also leads to a slightly accelerated SEE degradation under the continuous electron bombardment due to a faster surface charging. The MgO/Au film prepared at Ts of 773 K has a δ value of 4.9 at a primary electron energy of 200 eV and the maximum δ value of 11.5.
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Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Semiconductor materials and devices · ZnO doping and properties
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References (26)
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