A novel nanoporous silica polishing wheel for surface planarization of silicon wafers
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Research context
OpenAlex topics: Advanced Surface Polishing Techniques · Copper Interconnects and Reliability · Silicon Nanostructures and Photoluminescence
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References (13)
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8. Properties of silica colloid prepared by different processes in silicon wafer CMP
9. Electrical conductivity and 11B NMR studies of sodium borosilicate glasses10.1016/j.jnoncrysol.2007.10.007 ↗
10. Structural influence of PbO by means of FTIR and acoustics on calcium alumino-borosilicate glass system10.1016/j.jnoncrysol.2010.01.010 ↗
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12. Long-term heat treatment of phase separating sodium borosilicate glass10.1002/adem.201900187 ↗
13. Polishing pad with loose-held abrasive structure