Effects of TiN/TiSi2 buffer layer on the crystallinity and ohmicity of GaN on n-type Si (111)
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OpenAlex topics: GaN-based semiconductor devices and materials · Semiconductor materials and interfaces · Semiconductor Quantum Structures and Devices
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References (20)
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17. Chen · 2025 · 49
18. TEM analysis of an additional metal-rich component at the C49–C54 transformation in Ti/Si thin films capped with TiN10.1016/S0040-6090(02)00140-2 ↗
19. C54-TiSi2 formation using nanosecond laser annealing of A-Si/Ti/A-Si stacks10.1016/j.tsf.2024.140386 ↗
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