DataVXMaterials LettersPaper
journal article·2023-08

Ethylene for carbon doping of GaN by atmospheric pressure metal organic chemical vapor deposition

Li Zhang, Zhongyuan Dong, Xuguang Deng, Xin Zhou, Kun Xu, Feng Yang, Guohao Yu, Xiaodong Zhang, Yaming Fan, Zhongming Zeng, Zhipeng Wei, Baoshun Zhang

Materials Letters· Volume 345
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Abstract

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Materials processing

OpenAlex topics: GaN-based semiconductor devices and materials · Semiconductor materials and devices · Ga2O3 and related materials

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