Thermal desorption study on possible hydrogen sources and diffusion barriers in CMOS technology
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OpenAlex topics: Semiconductor materials and devices · Silicon and Solar Cell Technologies · Thin-Film Transistor Technologies
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References (11)
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6. Dangling-bond defects and hydrogen passivation in germanium10.1063/1.2793184 ↗
7. Optimal H2-dilution playing key role in accomplishing significant nanocrystallinity with both Si and Ge moieties in SiGe nanocomposite thin film network10.1016/j.apsusc.2022.153657 ↗
8. The effect of deuterium passivation at different steps of cmos processing on lifetime improvements of cmos transistors10.1109/16.777177 ↗
9. Quantum efficiency and dark current evaluation of a backside illuminated CMOS image sensor10.7567/JJAP.54.04DE09 ↗
10. Hydrogen desorption and diffusion in PECVD silicon nitride. Application to passivation of CMOS active pixel sensors10.1016/j.mee.2007.04.071 ↗
11. Formation of Si-H bonds on the surface of microcrystalline silicon covered with SiOx by HF treatment10.1016/0038-1098(84)90156-X ↗