Removing hardened organic materials during fabrication of integrated circuits
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Additive Manufacturing and 3D Printing Technologies · Advanced Surface Polishing Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (34)
Show source-provided references
1. Moran · Bell System Tech. J. · 1979 · 58 · 102710.1002/j.1538-7305.1979.tb03334.x ↗
2. Kerwin · Polymer Eng. Sci. · 1971 · 11 · 42610.1002/pen.760110513 ↗
3. Maydan · J. Vacuum Sci. Technol. · 1979 · 16 · 195910.1116/1.570365 ↗
4. E. Kinsbron, F. Vratny, R.E. Dean, D. Maydan and S. Broydo, Metallization by the Lift-Off Technique.
5. Stripping of PIQ, Praylin, HPR and Related Resists
6. Krumhansl · Phys. Today · 1979 · 30
7. Hom-ma · 1979 · 59, I 3.5
8. Semiconductor International
9. Herndon · 1979 · 3
10. Planar Metallization with Polymer
11. Lift-off Metallization
12. Lift-off Metallization
13. Shibata · 1979
14. B. Leonard, Philip Hunt Chemical Co., private communication.
15. A. Stein, Technology of Positive Photoresist, internal paper of Philip A. Hunt Corp.
16. Vratny · 1979
17. Organic chemistry
18. Organic chemistry
19. Organic chemistry
20. Organic chemistry
21. Comprehensive inorganic chemistry
22. Fountain · J. Appl. Polym. Sci. · 1975 · 19 · 176710.1002/app.1975.070190626 ↗
23. Kol'tsov · Vysokornol. soyed · 1974 · A16 · 2506
24. Kol'tsov · Vysokornol. soyed · 1976 · A18 · 1556
25. Andrieth · 1951
26. Finne · J. Electrochem. Soc. · 1967 · 114 · 96510.1149/1.2426793 ↗
27. Insulation
28. Sharma · 1974
29. Agnihotri · Polymer Eng. Sci. · 1977 · 17 · 36610.1002/pen.760170607 ↗
30. Agnihotri · IBM Tech. Disclosure Bull. · 1973 · 16 · 1284
31. Loukianoff · IBM Tech. Disclosure Bull. · 1973 · 15 · 2820
32. Lirova · Polymer · 1975 · 16 · 80510.1016/0032-3861(75)90111-1 ↗
33. NIOSH, Recommended Standards for Occupational Exposure to Hydrazine, U.S. Dept. of Health, Education, and Welfare.
34. Communication from Hummel Chemical, So. Plainfield, NJ.