journal article·2022-05

Carbon-assisted growth of equiangular 2D hexagons of AlN

Hayk Nersisyan, Nam Huynh Thanh, Jong Hyeon Lee, Hoyoung Suh, Soon Jik Hong

Materials Letters· Volume 314
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Abstract

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Research context

OpenAlex topics: GaN-based semiconductor devices and materials · Boron and Carbon Nanomaterials Research · Advanced ceramic materials synthesis

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References (8)

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2. Morphological diversity of AlN nano- and microstructures: synthesis, growth orientations and theoretical modelling (Review)
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4. Tunable wide-field illumination and single-molecule photo switching with a single MEMS mirror10.1021/acsphotonics.1c00843 ↗
5. A. Gao, K. Liu, J. Liang et al., AlN MEMS filters with extremely high bandwidth widening capability, Microsyst. Nanoeng. 6 (2020) 74 (1-11). https://doi.org/10.1038/s 41378-020-00183-5.10.1038/s41378-020-00183-5 ↗
6. Deposition and process development of AlN for MEMS acoustic sensor10.1016/j.vacuum.2018.08.062 ↗
7. A piezoelectric AlN MEMS hydrophone with high sensitivity and low noise density10.1016/j.sna.2020.112493 ↗
8. The characterization of surface acoustic wave devices based on AlN-metal structures10.3390/s16040526 ↗