The effect of magnetron sputter parameter on fiber coating character

Abstract In the course of preparation of titanium matrix composite by fiber-coating method, it is one of the important procedures to deposit titanium alloy onto SiC fiber. In our experiment, SiC fiber was coated with Ti–6Al–4V by magnetron sputtering. And then the coating was investigated by means of X-ray diffraction (XRD), scanning electron microscopy (SEM) and energy dispersive X-ray spectrometer (EDS). The coating whose composition is consistent with the target material, and whose thickness is uniform, has (001) texture preferred orientation. In addition, deposition rate, dimension of crystallites and surficial morphology are changed with sputtering parameters.