Effect of substrate temperature on the adhesion properties of magnetron sputtered nano-composite Si–C–N hard thin films
Source abstract
Abstract
The adhesion and film failure studies on nano-composite SiCN thin films on silicon, glass and steel have been carried out. It was observed that both coating as well as the substrate has an influence on the adhesion of film. The films on hard substrate Si failed adhesively whereas on softer substrate, steel, cohesive failure was observed. The measured critical load was around 18 N and 24 N for SiCN film on silicon and steel substrate respectively. A decrease in critical load and interface toughness with the increase of substrate temperature during deposition for glass and steel substrate was observed.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Metal and Thin Film Mechanics · Diamond and Carbon-based Materials Research · Advanced ceramic materials synthesis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (16)
Show source-provided references
1. Structure analysis and properties of Si–C–N ceramics derived from polysilazanes10.1002/(SICI)1521-396X(199803)166:1<269::AID-PSSA269>3.0.CO;2-7 ↗
2. A covalent micro/nano composite resistant to high temperature oxidation10.1038/374526a0 ↗
3. An ASTM standard for quantitative scratch adhesion testing of thin, hard ceramic coatings
4. The scratch adhesion test an elastic–plastic indentation analysis10.1016/0040-6090(88)90006-5 ↗
5. Critical loads and effective frictional force measurements in the industrial scratch testing of TiN on M2 tool steel10.1016/S0040-6090(99)00450-2 ↗
6. Techniques for evaluating mechanical properties of hard coatings10.1116/1.572846 ↗
7. An overview of the potential of quantitative coating adhesion measurement by scratch testing10.1016/j.triboint.2005.04.013 ↗
8. Adhesion evaluation of PVD coatings to aluminium substrate10.1016/S0257-8972(00)00670-8 ↗
9. Zhou · J. Eur. Ceram. Soc. · 2006 · 26 · 132510.1016/j.jeurceramsoc.2005.02.004 ↗
10. Development of PECVD Si/C/N:H films for tribological and corrosive complex load conditions10.1016/j.surfcoat.2005.02.111 ↗
11. Bharat Bushan, B.K. Gupta, Handbook of Tribology (Materials Coatings and Surface Treatments)15.45- 15.58 ISBN0-07-005249-2.
12. New developments in the modelling of hardness and scratch adhesion of thin films10.1016/0257-8972(90)90121-R ↗
13. Deposition of nanostructured SiCN superhard coatings by rf magnetron sputtering10.1116/1.2200377 ↗
14. Effect of pressure and substrate temperature on the deposition of nano-structured silicon–carbon–nitride superhard coatings by magnetron sputtering10.1016/j.tsf.2006.11.167 ↗
15. The Adhesion of Chemically vapour deposited hard coatings to steel — the scratch test10.1016/0040-6090(81)90419-3 ↗
16. Adhesion testing by scratch test method: the influence of intrinsic and extrinsic parameters on the critical load10.1016/0040-6090(87)90377-4 ↗