Reaction intermediate(s) in the conversion of β-gallium oxide to gallium nitride under a flow of ammonia

Abstract The process of conversion of β-gallium oxide (β-Ga 2 O 3 ) to gallium nitride (GaN) under a flow of ammonia was monitored by XRD, IR, and 71 Ga magic-angle spinning (MAS) NMR spectroscopy. It is most likely that the conversion of β-Ga 2 O 3 to GaN does not proceed through Ga 2 O but stepwise via amorphous gallium oxynitrides (GaO x N y ) as intermediates.