Subsurface deformation and crack propagation between 3C-SiC/6H-SiC interface by applying in-situ laser-assisted diamond cutting RB-SiC
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OpenAlex topics: Advanced Surface Polishing Techniques · Diamond and Carbon-based Materials Research · Advanced ceramic materials synthesis
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References (10)
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1. Theoretical study on removal rate and surface roughness in grinding a RB-SiC mirror with a fixed abrasive10.1364/AO.48.000904 ↗
2. Recrystallization of amorphized Si during micro-grinding of RB-SiC/Si composites10.1016/j.matlet.2016.02.027 ↗
3. Mechanism for material removal in diamond turning of reaction-bonded silicon carbide10.1016/j.ijmachtools.2008.12.007 ↗
4. Subsurface damage and phase transformation in laser-assisted nanometric cutting of single crystal silicon10.1016/j.matdes.2020.108524 ↗
5. Thermal softening-suppressed inter-granular embrittlement of polycrystalline 3C-SiC under diamond cutting10.1016/j.matdes.2022.111250 ↗
6. Mechanical properties of α-SiC and correlation to SiC/Si interface at nanoscale from reaction bonded SiC/Si composites (RBSC)10.1007/s10443-020-09825-3 ↗
7. Experimental investigation on the surface and subsurface damages characteristics and formation mechanisms in ultra-precision grinding of SiC10.1007/s00170-017-0267-4 ↗
8. Microstructural evolution in reaction-bonded silicon carbide10.1007/BF00553278 ↗
9. Raman investigation of SiC polytypes10.1002/1521-396X(199707)162:1<39::AID-PSSA39>3.0.CO;2-L ↗
10. Raman scattering from hydrogenated microcrystalline and amorphous silicon10.1088/0022-3719/15/2/019 ↗