Novel hydrogen gas sensor based on Pd and SnO2 nanoclusters

Hydrogen gas sensors based on Pd and SnO2 nanoclusters are investigated in this work. The devices were produced by self-assembly of nanoclusters on SiO2/Si substrates with pre-formed Au/NiCr electrodes. The nanoclusters were produced by sputtering and inert gas condensation inside an ultra-high vacuum compatible system. The sensors exhibited enhanced sensitivity at low temperatures, and linear response with hydrogen concentration. The low operation temperature, low operation power requirement, and low production cost of the present sensors make them suitable for practical and industrial applications.