The FTIR studies of SnO2:Sb(ATO) films deposited by spray pyrolysis

Abstract Thin films of SnO 2 :Sb were prepared by ultrasonic spray pyrolysis method. The role of antimony in the SnO 2 is demonstrated by FTIR. It is found that at low Sb concentrations, the Sb ions prefer to substitute Sn 4+ in form of Sb 5+ . While beyond a certain Sb concentration, Sb ions start to be reduced to Sb 3+ , which have a negative effect on carrier concentration that, in turn, affects the reflectivity of SnO 2 :Sb films. The increased disorder of SnO 2 at high Sb concentration is also shown by FTIR. The discussion of carrier scattering suggests that the ionized impurity and/or neutral impurity scattering are the dominant scattering mechanisms.