Phase transformation and microstructural evolution of tantalum carbide coatings on graphite in a TaCl5-H2-Ar gas–solid CVD system
Source abstract
Abstract
This study investigates the phase transformation and microstructural evolution of TaC coatings formed on graphite in a TaCl5-H2-Ar gas–solid CVD system without an external carbon precursor. The as-deposited coating consisted of a mixed Ta2C/TaC layer, indicating that limited and spatially non-uniform carbon availability during deposition favored the formation of a Ta-rich intermediate carbide together with TaC. After annealing, the coating evolved into a TaC-dominant state, accompanied by carbon redistribution and microstructural rearrangement within the coating. A second deposition–annealing cycle preserved the TaC-dominant phase and further modified the surface morphology. Combined structural, interfacial, and mechanical characterizations clarified the relationship among processing route, phase evolution, interfacial/microstructural development, and local mechanical response in this no-external-carbon-precursor system. The final coating exhibited a hardness of 16.4 ± 1.5 GPa and an elastic modulus of 240.3 ± 24.5 GPa. This study provides a basis for the design of refractory carbide coatings on carbon-based substrates.
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · Advanced ceramic materials synthesis · Diamond and Carbon-based Materials Research
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References (30)
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