article·2016-01-01

田口の方法およびグレー関連解析を用いたc面窒化ガリウムの化学的機械的平坦化プロセスパラメータの最適化【Powered by NICT】

D M Nelabhotla, T V Jayaraman, Kazemzadeh Asghar, Dulal Das

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Source: Not provided · Quality: missing

Research context

OpenAlex topics: Military Technology and Strategies · Legal and Regulatory Analysis · Linguistic, Cultural, and Literary Studies

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References

Reference metadata was not supplied for this record.