Control of morphology and orientation for textured nanocrystalline indium oxide thin film: A growth zone diagram

Abstract The function and performance of textured polycrystalline thin films are closely related to their microstructures. However, the corresponding growth mechanisms remain unclear, which brings obstacles to the effective engineering of the films' properties. In this work, textured nanocrystalline Indium Oxide (nc-In 2 O 3 ) thin films are prepared and the growth mechanism is explored. Texture morphology within or beyond the prediction of Wulff's theorem and van der Drift's growth mechanism are both observed. The orientation of the textured film changes from (100)-preferred in quasi-equilibrium growth conditions to (111)-preferred in non-equilibrium growth conditions. From a microscopic perspective of adatoms' diffusion, different growth modes for the growth of the textured In 2 O 3 thin films is classified and a quantitative growth zone model is developed. According to the zone model, the morphology and orientation of the films could be successfully designed and controlled by changing growth conditions.