journal article·1999-02-01

Three-Dimensional Metallic Microstructures Fabricated by Soft Lithography and Microelectrodeposition

Rebecca J. Jackman, Scott T. Brittain, Allan Adams, Hongkai Wu, Mara G. Prentiss, Sue Whitesides, George M. Whitesides

Langmuir· Volume 15· Issue 3
Publisher page

Abstract

Soft lithography offers a convenient set of methods for the transfer of patterns to planar and nonplanar substrates. Microelectrodeposition can transform thin metal patterns into self-supporting microstructures, weld components together, and strengthen microstructures after deformations. Together, soft lithography and electrochemistry provide synergistic technologies and the basis for a strategy for converting planar patterns into three-dimensional (3D) microstructures with complex topologies. This strategy is illustrated in the formation of folded tetrahedra, square-based pyramids, cylinders with joints, “pop-up” cubes, and linked chains and knots.
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Research context

OpenAlex topics: Nanofabrication and Lithography Techniques · Advanced Materials and Mechanics · Modular Robots and Swarm Intelligence

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Chemistry and Chemical Biology, Harvard University, 12 Oxford Street, Cambridge, Massachusetts 02138, Department of Physics, Harvard University, 9 Oxford Street, Cambridge, Massachusetts 02138, and School of Computer Science, McGill University, 3480 University #318, Montreal PQ H3A 2A7, Canada

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