DFT Study on CO2- and H2O-Enhanced Solubility Contrast in Tin-Oxo Cage Photoresists
Source abstract
Abstract
The tin-oxo cage is a promising photoresist due to tin’s large extreme ultraviolet (EUV) photon cross-section and small size. CO 2 and H 2 O play a crucial role in increasing the solubility contrast of tin-oxo cages in deep ultraviolet (DUV) and EUV lithography. However, the internal reaction mechanisms remain largely unknown. This work systematically investigated the cleavage of carbon–tin bonds in tin-oxo cages by density functional theory (DFT) upon diverse irradiation (DUV and EUV). Subsequently, the interactions of the resulting intermediates with CO 2 /H 2 O (or their hybrid) were examined, revealing that hydroxyl compounds (from the dissociation of H 2 O) serve as pivotal precursors to trigger new cross-linking reactions (forming Sn–O–Sn and Sn–OCO–Sn products) and enhance the solubility switch. These theoretical results provide insight into the atomic-scale mechanisms of small molecules improving photoresist properties, offering new perspectives for the design and optimization of novel photoresist materials.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Catalytic Processes in Materials Science · CO2 Reduction Techniques and Catalysts · Catalysis and Oxidation Reactions
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Key Laboratory of Radiation Physics and Technology, Ministry of Education, Institute of Nuclear Science and Technology, Sichuan University, No. 24 South Section 1, Yihuan Road, Chengdu 610065, People’s Republic of China
State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics
Chinese Academy of Sciences
College of Physic, Sichuan University, No. 24 South Section 1, Yihuan Road, Chengdu 610065, People’s Republic of China
State Key Laboratory of Applied Organic Chemistry, Key Laboratory of Nonferrous Metal Chemistry and Resources Utilization of Gansu Province, College of Chemistry and Chemical Engineering, Lanzhou University, No. 222 South Tianshui Road, Lanzhou 730000, People’s Republic of China
Funding
Sichuan University · Science and Technology Department of Sichuan Province
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