journal article·2018-06-25Open access

Thermal Stability of Copper–Nickel and Copper–Nickel Silicide Contacts for Crystalline Silicon

Abhijit S. Kale, William Nemeth, Craig L. Perkins, David Young, Alexander Marshall, Karine Florent, Santosh K. Kurinec, Paul Stradins, Sumit Agarwal

ACS Applied Energy Materials· Volume 1· Issue 6

Abstract

Copper is a low-cost, low-damage alternative to Ag paste for front-side metallization of crystalline Si (c-Si) solar cells, but requires conductive diffusion barriers like Ni or NiSi. Thermal stability of these barriers during postmetallization anneal is critical for performance. In this study, we address the structural and chemical stability of Cu contacts with both Ni and NiSi barrier layers, identifying interfacial reactions responsible for their degradation. Superior thermal and chemical stability of single-phase NiSi barrier as compared to Ni is made evident by XRD, Auger, and Raman spectroscopies. Moreover, the commonly used Cu–Ni–Si contact stack does not convert to more stable Cu–NiSi–Si stack upon thermal treatment. Instead, Cu readily alloys with the Ni layer and reacts with the underlying c-Si to form Cu3Si, with no evidence for the formation of NixSi phases. Also, even the superior NiSi barrier slowly dissolves into Cu at elevated temperatures.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: Silicon and Solar Cell Technologies · Semiconductor materials and interfaces · Thin-Film Transistor Technologies

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Chemical and Biological Engineering Department, Colorado School of Mines, 1613 Illinois Street, Golden, Colorado 80401, United States

National Energy Renewable Laboratory, 15013 Denver West Parkway, Golden, Colorado 80401, United States

Electrical and Microelectronic Engineering, Rochester Institute of Technology, 1 Lomb Memorial Drive, Rochester, New York 14623, United States

Funding

National Renewable Energy Laboratory · Solar Energy Technologies Program

References (34)

Show source-provided references
1. 10.1109/5.58897110.1109/5.588971 ↗
2. 10.1016/j.egypro.2013.11.08510.1016/j.egypro.2013.11.085 ↗
3. 10.1007/s11664-006-0311-x10.1007/s11664-006-0311-x ↗
4. 10.1016/j.solmat.2006.03.04010.1016/j.solmat.2006.03.040 ↗
5. 10.1016/j.solmat.2012.06.04010.1016/j.solmat.2012.06.040 ↗
6. 10.1063/1.156233810.1063/1.1562338 ↗
7. Hilali, M. M.; To, B.; Rohatgi, A. A Review and Understanding of Screen-Printed Contacts and Selective–Emitter Formation. In 14th Workshop on Crystalline Silicon Solar Cells & Modules: Materials and Processes, 2004; pp 109–116.
8. 10.1109/JPHOTOV.2014.232166310.1109/JPHOTOV.2014.2321663 ↗
9. Kim D. S. · New. Renew. Ener. · 2005 · 1 · 37
10. 10.1109/PVSC.2005.148835410.1109/PVSC.2005.1488354 ↗
11. 10.1016/j.solener.2009.03.00210.1016/j.solener.2009.03.002 ↗
12. 10.1149/1.142134810.1149/1.1421348 ↗
13. 10.1007/s00339005064910.1007/s003390050649 ↗
14. 10.1063/1.141535010.1063/1.1415350 ↗
15. 10.1007/s11837-005-0111-410.1007/s11837-005-0111-4 ↗
16. 10.1116/1.58111410.1116/1.581114 ↗
17. 10.1016/S0167-9317(01)00684-010.1016/S0167-9317(01)00684-0 ↗
18. 10.1016/j.mseb.2004.07.03310.1016/j.mseb.2004.07.033 ↗
19. 10.1016/j.mee.2003.08.01010.1016/j.mee.2003.08.010 ↗
20. 10.1016/S0169-4332(99)00513-910.1016/S0169-4332(99)00513-9 ↗
21. Froment, B.; Carron, V.; Morand, Y.; Descombes, S.; Halimaoui, A.; Muller, M.; Pouydebasque, A.; Wacquant, F.; Ceccarelli, D.; DeJonghe, V. Nickel Silicide Optimized Process Formation for High Performance sub-65 nm Nodes. 205th Electrochemical Society, 2004; paper 260.
22. 10.1149/1.346698410.1149/1.3466984 ↗
23. 10.1109/JPHOTOV.2015.246374110.1109/JPHOTOV.2015.2463741 ↗
24. Hernandez, J. L.; Tous, L.; Allebe, C.; Philipsen, H.; Schlenker, E.; John, J.; Baert, K.; Poortmans, J.Application of CMOS Metal Barriers to Copper Plated Silicon Solar Cells. 25th EU-PVSEC, 2010; pp 1479–1483.
25. 10.1109/WCPEC.2006.27960810.1109/WCPEC.2006.279608 ↗
26. 10.1016/j.solmat.2014.12.02410.1016/j.solmat.2014.12.024 ↗
27. 10.1016/j.solmat.2014.07.02610.1016/j.solmat.2014.07.026 ↗
28. 10.1016/j.egypro.2012.05.00610.1016/j.egypro.2012.05.006 ↗
29. 10.1109/PVSC.2016.775019010.1109/PVSC.2016.7750190 ↗
30. 10.1002/pssr.20080200910.1002/pssr.200802009 ↗
31. Kern W. · RCA Rev. · 1970 · 31 · 187
32. 10.1016/j.apsusc.2010.07.08510.1016/j.apsusc.2010.07.085 ↗
33. 10.1002/sia.74015090410.1002/sia.740150904 ↗
34. 10.1016/j.micron.2008.03.00710.1016/j.micron.2008.03.007 ↗