A Laser-Assisted Fabrication Metal Film Vibration Sensor for Achieving Omnidirectional Response

With the rapid development of the Industrial Internet and intelligent technologies, vibration sensors have evolved into core components of mechanical condition monitoring and equipment health management. Analyzing vibration signals enables real-time monitoring, fault prediction, and life assessment. However, most commercial sensors exhibit anisotropic responses to multidirectional stimuli, limiting their performance in complex environments. To address this issue, we propose a rigid–flexible hybrid vibration sensor based on a symmetric cross-beam structure, which significantly enhances directional response uniformity. A composite PDMS–copper substrate is adopted to tune mechanical properties, combining flexibility with structural robustness. Furthermore, a high-sensitivity bioinspired sensing interface is fabricated by generating microcrack networks on copper via femtosecond laser ablation, followed by silver nanoparticle deposition through magnetron sputtering. The resulting sensor exhibits excellent omnidirectional dynamic response, with a sensitivity of 3.53 kPa–1, linearity of 0.984, and broad frequency detection from 20 to 900 Hz. It also demonstrates high stability and accuracy in practical applications. Benefiting from a simplified structure and scalable fabrication process, the proposed sensor reduces production costs and technical complexity. These advantages highlight its strong potential for intelligent manufacturing, wearable electronics, robotic sensing, and vibration monitoring in complex mechanical systems.