Nanomechanical properties of Nb films deposited by pulsed frequency magnetron sputtering
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OpenAlex topics: Metal and Thin Film Mechanics · Force Microscopy Techniques and Applications · nanoparticles nucleation surface interactions
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References (36)
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1. Bagheri S, Strohfeldt N, Ubl M, Berrier A, Merker M, Richter G, Siegel M, Giessen H (2018) Niobium as alternative material for refractory and active plasmonics. ACS Photonics 5:3298–3304. https://doi.org/10.1021/acsphotonics.8b0053010.1021/acsphotonics.8b00530 ↗
2. Wilde S, Valizadeh R, Malyshev OB, Stenning GBG, Sian T, Chesca B (2018) dc magnetometry of niobium thin film superconductors deposited using high power impulse magnetron sputtering. Phys Rev Accel Beams 073101:1–12. https://doi.org/10.1103/PhysRevAccelBeams.21.07310110.1103/PhysRevAccelBeams.21.073101 ↗
3. Seifried F, Leiste H, Schwaiger R, Ulrich S, Seifert HJ, Stueber M (2018) Structure, morphology and selected mechanical properties of magnetron sputtered (Mo, Ta, Nb) thin films on NiTi shape memory alloys. Surf Coat Technol 347:379–389. https://doi.org/10.1016/j.surfcoat.2018.05.01410.1016/j.surfcoat.2018.05.014 ↗
4. Li M, Pu G, Luo Y, Ye Z, Wei J, Chen S, Wu A, Yang L (2021) The investigation of chemical vapor deposited copper-based niobium films. Mater Res Express 8:046402–04641510.1088/2053-1591/abefb1 ↗
5. Ramana CV, Makeswaran N, Zade V, Das D, Tan S, Xu S, Beyerlein IJ (2022) Fabrication and characterization of high-quality epitaxial nanocolumnar Niobium films with abrupt interfaces on YSZ(001). Phys Chem C. https://doi.org/10.1021/acs.jpcc.1c0873810.1021/acs.jpcc.1c08738 ↗
6. Bagheri S, Zgrabik CM, Gissibl T, Tittl A, Sterl F, Walter R, De Zuani S, Berrier A, Stauden T, Hu EL, Giessen H (2015) Large-area fabrication of TiN nanoantenna arrays for refractory plasmonics in the mid- infrared by femtosecond direct laser writing and interference lithography [Invited ]. Opt Mater Express 5:7998–8006. https://doi.org/10.1364/OME.5.00262510.1364/OME.5.002625 ↗
7. Guler U, Technologies R, Naik G, Kildishev AV (2012) Performance analysis of nitride alternative plasmonic materials for localized surface plasmon applications Performance analysis of nitride alternative plasmonic materials for localized surface plasmon applications. Appl Phys B Lasers Opt 107:5708–5713. https://doi.org/10.1007/s00340-012-4955-310.1007/s00340-012-4955-3 ↗
8. West PR, Ishii S, Naik GV, Emani NK, Shalaev VM (2010) Searching for better plasmonic materials. Laser Photon Rev 808:795–808. https://doi.org/10.1002/lpor.20090005510.1002/lpor.200900055 ↗
9. Kurter C, Abrahams J, Shvets G, Anlage SM (2013) Plasmonic scaling of superconducting metamaterials. Phys Rev 180510:1–5. https://doi.org/10.1103/PhysRevB.88.18051010.1103/PhysRevB.88.180510 ↗
10. Skliarova H, Azzolini O, Cherenkova-Dousset O, Johnson RR, Palmieri V (2014) Niobium-based sputtered thin films for corrosion protection of proton-irradiated liquid water targets for [18F] production. J Phys D Appl Phys 47:45306–45317. https://doi.org/10.1088/0022-3727/47/4/04530610.1088/0022-3727/47/4/045306 ↗
11. Berti G, Torres-Castanedo CG, Goronzy DP, Bedzyk MJ, Hersam MC, Kopas C, Marshall J, Iavarone M (2023) Scanning tunneling microscopy and spectroscopy characterization of Nb films for quantum applications. Appl Phys Lett 122:192605–192611. https://doi.org/10.1063/5.014509010.1063/5.0145090 ↗
12. Gontad F, Lorusso A, Panareo M, Monteduro AG, Maruccio G (2015) Nanomechanical and electrical properties of Nb thin films deposited on Pb substrates by pulsed laser deposition as a new concept photocathode for superconductor cavities. Nucl Instrum Methods Phys Res A 804:132–136. https://doi.org/10.1016/j.nima.2015.09.06410.1016/j.nima.2015.09.064 ↗
13. Audronis M, Leyland A, Kelly PJ, Matthews A (2006) The effect of pulsed magnetron sputtering on the structure and mechanical properties of CrB2 coatings. Surf Coat Technol 201:3970–3976. https://doi.org/10.1016/j.surfcoat.2006.08.00610.1016/j.surfcoat.2006.08.006 ↗
14. Albrecht G, Ubl M, Kaiser S, Giessen H, Hentschel M (2018) Comprehensive study of plasmonic materials in the visible and near- infrared: linear, refractory, and nonlinear optical properties. ACS Photonics 5:1058–1067. https://doi.org/10.1021/acsphotonics.7b0134610.1021/acsphotonics.7b01346 ↗
15. Park JH, Han SE, Nagpal P, Norris DJ (2016) Observation of thermal beaming from tungsten and molybdenum Bull’s eyes. ACS Photonics 3:494–500. https://doi.org/10.1021/acsphotonics.6b0002210.1021/acsphotonics.6b00022 ↗
16. Nečas D, Klapetek P (2012) Gwyddion: an open-source software for SPM data analysis. Cent Eur J Phys 10:181–188. https://doi.org/10.2478/s11534-011-0096-210.2478/s11534-011-0096-2 ↗
17. Stan G, Solares SD (2014) Frequency, amplitude, and phase measurements in contact resonance atomic force microscopies. Beilstein J Nanotechnol 5:278–288. https://doi.org/10.3762/bjnano.5.3010.3762/bjnano.5.30 ↗
18. Flores-Ruiz FJ, Espinoza-Beltrán FJ, Diliegros-Godines CJ, Siqueiros JM, Herrera-Gómez A (2016) Atomic force acoustic microscopy: influence of the lateral contact stiffness on the elastic measurements. Ultrasonics 71:271–277. https://doi.org/10.1016/j.ultras.2016.07.00310.1016/j.ultras.2016.07.003 ↗
19. Rabe U (2006) Atomic force acoustic microscopy. In: Bhushan B, Fuchs H (Eds), Appl. Scanning Probe Methods II Scanning Probe Microsc. Tech., Springer Berlin Heidelberg, Berlin, Heidelberg, pp 37–90. https://doi.org/10.1007/3-540-27453-7_210.1007/3-540-27453-7_2 ↗
20. Espinoza-Beltrán FJ, Geng K, Muñoz Saldaña J, Rabe U, Hirsekorn S, Arnold W (2009) Simulation of vibrational resonances of stiff AFM cantilevers by finite element methods. New J Phys 11:083034–083056. https://doi.org/10.1088/1367-2630/11/8/08303410.1088/1367-2630/11/8/083034 ↗
21. Garduño-Medina A, Muñoz-Pineda E, Vázquez-Delgado MA, Garcia-Vazquez V, Espinosa-Luna R, Flores-Ruiz FJ (2021) AFM measurement of the cuticle of the orchid bee Euglossa sp.: elastic properties under dehydrated and hydrated conditions. Measurement 185:110045–110060. https://doi.org/10.1016/j.measurement.2021.11004510.1016/j.measurement.2021.110045 ↗
22. Taleb S, Badillo M, Flores-Ruiz FJ, Acuautla M (2023) From synthesis to application: high-quality flexible piezoelectric sensors fabricated from tetragonal BaTiO3/ P(VDF-TrFE) composites. Sens Actuators A Phys 361:114585–114596. https://doi.org/10.1016/j.sna.2023.11458510.1016/j.sna.2023.114585 ↗
23. Vlcek J, Pajdarov AD, Musil J (2004) Pulsed dc magnetron discharges and their utilization in plasma surface engineering. Plasma Phys 44:426–436. https://doi.org/10.1002/ctpp.200410010.1002/ctpp.2004100 ↗
24. Bradley JW, Backer H, Aranda-Gonzalvo Y, Kelly PJ, Arnell RD (2002) The distribution of ion energies at the substrate in an asymmetric bi-polar pulsed DC magnetron discharge. Plasma Sour Sci Technol 11:165–17410.1088/0963-0252/11/2/307 ↗
25. Ma Q, Rosenberg RA (2003) Angle-resolved X-ray photoelectron spectroscopy study of the oxides on Nb surfaces for superconducting r. f. cavity applications. Appl Surf Sci 206:209–21710.1016/S0169-4332(02)01238-2 ↗
26. Ma Q, Ryan P, Freeland JW, Rosenberg RA (2004) Thermal effect on the oxides on Nb (100) studied by synchrotron-radiation X- ray photoelectron spectroscopy. J Appl Phys 96:7675–7680. https://doi.org/10.1063/1.180977410.1063/1.1809774 ↗
27. Sharahi HJ, Janmaleki M, Tetard L, Kim S, Sadeghian H, Verbiest GJ (2021) Acoustic subsurface-atomic force microscopy: three- dimensional imaging at the nanoscale. J Appl Phys 129:030901–030922. https://doi.org/10.1063/5.003515110.1063/5.0035151 ↗
28. Rabe U, Kopycinska-Müller M, Hirsekorn S (2013) Atomic force acoustic microscopy. In: Acoust Scanning Probe Microsc, pp 315–350. https://doi.org/10.1007/978-3-642-27494-710.1007/978-3-642-27494-7 ↗
29. Khamseh S, Alibakhshi E, Ramezanzadeh B, Sari MG, Nezhad AK (2020) Developing a graphite like carbon: niobium thin film on GTD-450 stainless steel substrate. Appl Surf Sci 511:145613–145623. https://doi.org/10.1016/j.apsusc.2020.14561310.1016/j.apsusc.2020.145613 ↗
30. Hurley DC, Shen K, Jennett NM, Turner JA (2003) Atomic force acoustic microscopy methods to determine thin-film elastic properties. J Appl Phys 94:2347–2354. https://doi.org/10.1063/1.159263210.1063/1.1592632 ↗
31. Xu Z, Yate L, Qiu Y, Aperador W, Coy E, Jiang B, Moya S, Wang G, Pan H (2019) Potential of niobium-based thin films as a protective and osteogenic coating for dental implants: the role of the nonmetal elements. Mater Sci Eng C 96:166–175. https://doi.org/10.1016/j.msec.2018.10.09110.1016/j.msec.2018.10.091 ↗
32. Li X, Cao WH, Tao XF, Ren LL, Zhou LQ, Xu GF (2016) Structural and nanomechanical characterization of niobium films deposited by DC magnetron sputtering. Appl Phys A 122:505–511. https://doi.org/10.1007/s00339-016-9990-110.1007/s00339-016-9990-1 ↗
33. Zgheib E, Alhussein A, Slim MF, Khalil K, François M (2019) Multilayered models for determining the Young’s modulus of thin films by means of Impulse Excitation Technique. Mech Mater 137:103143–103160. https://doi.org/10.1016/j.mechmat.2019.10314310.1016/j.mechmat.2019.103143 ↗
34. Kopycinska-Müller M, Striegler A, Köhler B, Wolter K-J (2011) Mechanical characterization of thin films by use of atomic force acoustic microscopy. Adv Eng Mater 13:312–318. https://doi.org/10.1002/adem.20100024510.1002/adem.201000245 ↗
35. Liu Y, Varghese S, Ma J, Yoshino M, Lu H, Komanduri R (2015) Orientation effects in nanoindentation of single crystal copper. Int J Plast 24:1990–2015. https://doi.org/10.1016/j.ijplas.2008.02.00910.1016/j.ijplas.2008.02.009 ↗
36. Lin J, Wu ZL, Zhang XH, Mishra B, Moore JJ, Sproul WD (2009) A comparative study of CrNx coatings synthesized by dc and pulsed dc magnetron sputtering. Thin Solid Films 517:1887–1894. https://doi.org/10.1016/j.tsf.2008.09.09310.1016/j.tsf.2008.09.093 ↗