journal article·2024-06

Substrate-dependent structural evolution during the oxidation of SiNx thin films

Gowun Jung, Sehun Kim, Jiho Eom, In Young Song, Jinhee Lee, Seong-Keun Cho, Wang-Eun Lee, Kyuyoung Heo, Tae-Yeon Cho, Hwanhui Yun

Journal of Materials Science· Volume 59· Issue 23
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Abstract

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OpenAlex topics: Semiconductor materials and devices · Nanowire Synthesis and Applications · Semiconductor materials and interfaces

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References (44)

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