journal article·2024-02

Wet chemical etching of silicon for conically textured surfaces

M. A. Zrir, M. Kakhia, N. AlKafri

Journal of Materials Science· Volume 59· Issue 5
Publisher page

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Source: Not provided · Quality: missing

Research context

OpenAlex topics: Nanowire Synthesis and Applications · Silicon Nanostructures and Photoluminescence · Semiconductor materials and devices

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (26)

Show source-provided references
1. Singh PK, Kumar R, Lal M, Singh SN, Das BK (2001) Effectiveness of anisotropic etching of silicon in aqueous alkaline solutions. Sol Energy Mater Sol Cells 70:103–11310.1016/S0927-0248(00)00414-1 ↗
2. Papet P, Nichiporuk O, Kaminski A, Rozier Y, Kraiem J, Lelievre J-F, Chaumartin A, Fave A, Lemiti M (2006) Pyramidal texturing of silicon solar cell with TMAH chemical anisotropic etching. Sol Energy Mater Sol Cells 90:2319–232810.1016/j.solmat.2006.03.005 ↗
3. Rola KP, Zubel I (2006) Effect of molecular structure of alcohols on wet anisotropic etching of silicon. Sens Actuators, A 242:18–2610.1016/j.sna.2016.02.032 ↗
4. Angermann H, Rappich J, Korte L, Sieber I, Conrad E, Schmidt M, Hubener K, Polte J, Hauschild J (2008) Wet-chemical passivation of atomically flat and structured silicon substrates for solar cell application. J Appl Phys Sci 254:3615–3625
5. Fujiwara H, Kondo M (2007) Impact of epitaxial growth at the heterointerface of a-Si:H/c-Si solar cells. Appl Phys Lett 90:013503-1–013503-310.1063/1.2426900 ↗
6. Wang TH, Iwaniczko E, Page MR, Levi DH, Yan Y, Branz HM, Wang Q (2006) Effect of emitter deposition temperature on surface passivation in hot-wire chemical vapor deposited silicon heterojunction solar cells. Thin Solid Films 501:284–28710.1016/j.tsf.2005.07.196 ↗
7. Olibet S, Vallat-Sauvain E, Fesquet L, Monachon C, Hessler-Wyser A, Damon-Lacoste J, De Wolf S, Ballif C (2010) Properties of interfaces in amorphous/crystalline silicon heterojunctions. Phys Status Solidi A 207:651–65610.1002/pssa.200982845 ↗
8. Pla J, Centurioni E, Summonte C, Rizzoli R, Migliori A, Desalvo A, Zignani F (2002) Homojunction and heterojunction silicon solar cells deposited by low temperature–high frequency plasma enhanced chemical vapour deposition. Thin Solid Films 405:248–25510.1016/S0040-6090(01)01709-6 ↗
9. Gielis JJH, van den Oever PJ, Hoex B, van de Sanden MCM, Kessels WMM (2008) Real-time study of a-Si: H / c-Si heterointerface formation and epitaxial Si growth by spectroscopic ellipsometry, infrared spectroscopy, and second-harmonic generation. Phys Rev B 77:205329-1–205329-1610.1103/PhysRevB.77.205329 ↗
10. Kang MG, Tark S, Lee JC, Son CS, Kim D (2011) Changes in efficiency of a solar cell according to various surface-etching shapes of silicon substrate. J Cryst Growth 326:14–1810.1016/j.jcrysgro.2011.01.042 ↗
11. Rosa M, Allegrezza M, Canino M, Summonte C, Desalvo A (2011) TMAH-textured, a-Si/c-Si, heterojunction solar cells with 10% reflectance. Sol Energy Mater Sol Cells 95:2987–2993
12. Mrazkova Z, Sobkowicz IP, Foldyna M, Postava K, Florea I, Pištora J, Cabarrocas PRI (2018) Optical properties and performance of pyramidal texture silicon heterojunction solar cells: key role of vertex angles. Prog Photovolt Res Appl 26:369–37610.1002/pip.2994 ↗
13. Cousins PJ, Cotter JE (2006) Minimizing lifetime degradation associated with thermal oxidation of upright randomly textured silicon surfaces. Sol Energy Mater Sol Cells 90:228–24010.1016/j.solmat.2005.03.008 ↗
14. Fesquet L, Olibet S, Damon-Lacoste J, DeWolf S, Hessler-wyser A, Monachorr C, Ballif C, (2009) Modification of textured silicon wafer surface morphology for fabrication of heterojunction solar cell with open circuit voltage over 700 mV. In: 34th IEEE photovoltaic specialists conference (PVSC), Philadelphia, PA, 000754–00075810.1109/PVSC.2009.5411173 ↗
15. Ma K, Zeng X, Lei Q, Xue J, Wang Y, Zhao C (2014) Texturization and rounded process of silicon wafers for heterojunction with intrinsic thin-layer solar cells. Front Optoelectron 7:46–5210.1007/s12200-013-0386-y ↗
16. Yang L, Liu Y, Chen W, Wang Y, Liang H, Mei Z, Kuznetsov A, Du X (2015) Interface engineering of high efficiency organic-silicon heterojunction solar cells. ACS Appl Mater Interfaces 8:26–3010.1021/acsami.5b10959 ↗
17. Zin N, McIntosh K, Kho T, Franklin E, Fong K, Stocks M, Wang E, Ratcliff T, Blakers A, (2016) Rounded rear pyramidal texture for high efficiency silicon solar cells. In: IEEE 43rd photovoltaic specialists conference (PVSC), Portland, OR, 2548−255310.1109/PVSC.2016.7750107 ↗
18. Kumaravelu G, Alkaisi MM, Bittar A, Macdonald D, Zhao J (2004) Damage studies in dry etched textured silicon surfaces. Curr Appl Phys 4:108–11010.1016/j.cap.2003.10.008 ↗
19. Garnett EC, Yang P (2008) Silicon nanowire radial p−n junction solar cells. J Am Chem Soc 130:9224–922510.1021/ja8032907 ↗
20. Algasinger M, Paye J, Werner F, Schmidt J, Brandt MS, Stutzmann M, Koynov S (2013) Improved black silicon for photovoltaic applications. Adv Energy Mater 3:1068–107410.1002/aenm.201201038 ↗
21. Lin H, Cheung HY, Xiu F, Wang F, Yip S, Han N, Hung T, Zhou J, Wong HJCCY (2013) Developing controllable anisotropic wet etching to achieve silicon nanorods, nanopencils and nanocones for efficient photon trapping. J Mater Chem A 1:9942–994610.1039/c3ta11889d ↗
22. Dottermusch S, Schmager R, Klampaftis E, Paetel S, Kiowski O, Ding K, Richards BS, Paetzold UW (2019) Micro-cone textures for improved light in-coupling and retroreflection-inspired light trapping at the front surface of solar modules. Prog Photovolt Res Appl 27:1–1010.1002/pip.3133 ↗
23. Seidel H, Csepregi L, Heuberger A, Baumgärtel H (1990) Anisotropic etching of crystalline silicon in alkaline solutions: I. Orientation dependence and behavior of passivation layers. J Electrochem Soc 137:3612–362610.1149/1.2086277 ↗
24. Landsberger LM, Naseh S, Kahrizi M, Paranjape M (1996) On hillocks generated during anisotropic etching of Si in TMAH. J Microelectromech Syst 5:106–11610.1109/84.506198 ↗
25. Cullity BD (1956) Elements of x-ray diffraction. Addison-Wesley Publishing Comp. Inc., Massachusetts
26. Saini CP, Barman A, Kumar M, Satpati B, Som T, Kanjilal A (2016) Self-decorated Au nanoparticles on antireflective Si pyramids with improved hydrophobicity. J Appl Phys 119:134904-1–134904-710.1063/1.4945379 ↗