Correction to “Influence of Metal Substitution and Ion Energy on Microstructure Evolution of High-Entropy Nitride (TiZrTaMe)N_1–x (Me = Hf, Nb, Mo, or Cr) Films”

ADVERTISEMENT RETURN TO ISSUEPREVAddition/CorrectionNEXTORIGINAL ARTICLEThis notice is a correctionCorrection to "Influence of Metal Substitution and Ion Energy on Microstructure Evolution of High-Entropy Nitride (TiZrTaMe)N1–x (Me = Hf, Nb, Mo, or Cr) Films"Rui Shu*Rui ShuMore by Rui Shuhttps://orcid.org/0000-0002-2696-4372, Daniel LundinDaniel LundinMore by Daniel Lundin, Binbin XinBinbin XinMore by Binbin Xin, Mauricio A. SorticaMauricio A. SorticaMore by Mauricio A. Sorticahttps://orcid.org/0000-0002-9263-2237, Daniel PrimetzhoferDaniel PrimetzhoferMore by Daniel Primetzhoferhttps://orcid.org/0000-0002-5815-3742, Martin MagnusonMartin MagnusonMore by Martin Magnuson, Arnaud le FebvrierArnaud le FebvrierMore by Arnaud le Febvrier, and Per EklundPer EklundMore by Per Eklundhttps://orcid.org/0000-0003-1785-0864Cite this: ACS Appl. Electron. Mater. 2022, 4, 3, 1367Publication Date (Web):February 25, 2022Publication History Published online25 February 2022Published inissue 22 March 2022https://pubs.acs.org/doi/10.1021/acsaelm.2c00211https://doi.org/10.1021/acsaelm.2c00211correctionACS PublicationsCopyright © 2022 The Authors. Published by American Chemical Society. This publication is licensed under CC-BY 4.0. License Summary*You are free to share (copy and redistribute) this article in any medium or format and to adapt (remix, transform, and build upon) the material for any purpose, even commercially within the parameters below:Creative Commons (CC): This is a Creative Commons license.Attribution (BY): Credit must be given to the creator.View full license*DisclaimerThis summary highlights only some of the key features and terms of the actual license. It is not a license and has no legal value. Carefully review the actual license before using these materials. This publication is Open Access under the license indicated. Learn MoreArticle Views937Altmetric-Citations-LEARN ABOUT THESE METRICSArticle Views are the COUNTER-compliant sum of full text article downloads since November 2008 (both PDF and HTML) across all institutions and individuals. These metrics are regularly updated to reflect usage leading up to the last few days.Citations are the number of other articles citing this article, calculated by Crossref and updated daily. Find more information about Crossref citation counts.The Altmetric Attention Score is a quantitative measure of the attention that a research article has received online. Clicking on the donut icon will load a page at altmetric.com with additional details about the score and the social media presence for the given article. Find more information on the Altmetric Attention Score and how the score is calculated. Share Add toView InAdd Full Text with ReferenceAdd Description ExportRISCitationCitation and abstractCitation and referencesMore Options Share onFacebookTwitterWechatLinked InRedditEmail PDF (482 KB) Get e-Alertsclose Get e-Alerts