UV laser ablation of parylene films from gold substrates
Source abstract
Abstract
Parylene coatings on gold substrates were removed by laser ablation using 248-nm light from an excimer laser. Each sample was processed by a different number of pulses in one of three environments: air at atmospheric pressure, nitrogen at atmospheric pressure, and vacuum. The laser-induced craters were analyzed by optical microscopy and X-ray photoelectron spectroscopy. Multi-pulse ablation thresholds of gold and parylene were determined.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Laser Material Processing Techniques · Laser-induced spectroscopy and plasma · Laser-Ablation Synthesis of Nanoparticles
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (13)
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