journal article·2018-05Open access

Influence of nitrogen on the growth of vertical graphene nanosheets under plasma

Subrata Ghosh, S. R. Polaki, Nanda Gopala Krishna, M. Kamruddin

Journal of Materials Science· Volume 53· Issue 10

Abstract

We have investigated the effect of nitrogen (N2) as a carrier gas on the growth of vertical graphene nanosheets (VGN) by plasma enhanced chemical vapor deposition (PECVD). It is demonstrated that addition of nitrogen gas with a hydrocarbon precursor can enhance the nucleation and growth rate of graphitic base layer as well as vertical sheets. The gas also simultaneously acts as an etchant and a dopant element. The density of vertical sheets increases up to certain limit and start to decrease with further increase in N2 concentration. The synthesized VGN exhibit sheet resistance from 0.89 to 1.89 KΩ/sq. and mobility from 8.05 to 20.14 cm2/V-s, depending on the morphology and type of carrier concentration. These results reveal that the surface morphology and electronic properties of VGN can be tuned by incorporation of nitrogen gas during the growth phase.
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Research context

OpenAlex topics: Graphene research and applications · Diamond and Carbon-based Materials Research · Advancements in Battery Materials

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

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