journal article·1995-02

Particle generation and film formation in an atmospheric-pressure chemical vapour deposition process using tetraethylorthosilicate

Motoaki Adachi, Kikuo Okuyama, Noboru Tohge

Journal of Materials Science· Volume 30· Issue 4
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Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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Research context

OpenAlex topics: Catalytic Processes in Materials Science · Gas Sensing Nanomaterials and Sensors · Pigment Synthesis and Properties

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References (6)

Show source-provided references
1. M. ADACHI, K. OKUYAMA, N. TOHGE, M. SHIMADA, J. SATO and M. MUROYAMA,Jpn. J. Appl. Phys. 31 (1992) L1439.10.1143/JJAP.31.L1439 ↗
2. M. ADACHI, K. OKUYAMA, N. TOHGE, M. SHIMADA, J. SATO and M. MUROYAMA,Jpn. J. Appl. Phys. 32 (1993) L748.10.1143/JJAP.32.L748 ↗
3. K. OKUYAMA, Y. KOUSAKA, N. TOHGE, S. YAMAMOTO, J. J. WU, R. C. FLAGAN and J. H. SEINFELD,AIChE J. 32 (1986) 2010.10.1002/aic.690321211 ↗
4. F. L. GALEENER,J. Non-Cryst. Solids 49 (1982) 53.10.1016/0022-3093(82)90108-9 ↗
5. S. B. DESU,J. Am. Ceram. Soc. 72 (1989) 1615.10.1111/j.1151-2916.1989.tb06292.x ↗
6. L. L. TEDDER, L. GUANGQUAN and J. E. CROWELL,J. Appl. Phys. 69 (1991) 7037.10.1063/1.348932 ↗