The effect of substrate temperature on the electrical properties of thin chromium films
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Research context
OpenAlex topics: Copper Interconnects and Reliability · Semiconductor materials and devices · Metal and Thin Film Mechanics
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References (11)
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1. C. A. Neugebauer, ?Physics of Thin Films?, Vol. 2, edited by G. Hass and R. E. Thun (Academic Press, New York, 1964) p. 1.
2. K. L. Chopra andM. R. Randlett,J. Appl. Phys. 39 (1968) 1874.10.1063/1.1656444 ↗
3. A. J. Melmed,ibid. 36 (1965) 3585.10.1063/1.1703045 ↗
4. A. Yelon andR. W. Hoffman,ibid. 31 (1960) 1672.10.1063/1.1735913 ↗
5. R. B. Belser andW. H. Hicklin,ibid. 30 (1959) 313.10.1063/1.1735158 ↗
6. S. M. Shivaprasad andM. A. Angadi,J. Phys. D. (Appl. Phys.).
7. P. V. Ashrit andM. A. Angadi,J. Phys. F. Vacuum
8. L. A. Udachan, P. V. Ashrit, S. M. Shivaprasad andM. A. Angadi,Phys. Stat. Sol. (a) 60 (1980).10.1002/pssa.2210600259 ↗
9. D. Larson, ?Physics of Thin Films?, Vol. 6, edited by M. H. Francombe and R. W. Hoffman, (Academic Press, New York, 1971) p. 85.
10. P. V. Ashrit andM. A. Angadi,Phys. Stat. Sol. (a) 63 (1981) in press.10.1002/pssa.2210630168 ↗
11. A. K. Pal, P. Sen andA. K. Barua,Thin Solid Films 25 (1975) S25.10.1016/0040-6090(75)90269-2 ↗