journal article·1990-02

Highly efficient and stable radio-frequency — thermal plasma system for the production of ultrafine and ultrapure β-SiC powder

T. Kameyama, K. Sakanaka, A. Motoe, T. Tsunoda, T. Nakanaga, N. I. Wakayama, H. Takeo, K. Fukuda

Journal of Materials Science· Volume 25· Issue 2
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Abstract

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Research context

OpenAlex topics: Advanced ceramic materials synthesis · Copper Interconnects and Reliability · Advanced materials and composites

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References (11)

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